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759414 Sigma-Aldrich

Tetraethyl orthosilicate

packaged for use in deposition systems

Synonym: Orthosilicic acid tetraethyl ester, Silicon tetraethoxide, TEOS, Tetraethoxysilane, Tetraethoxysilicon(IV), Tetraethyl orthosilicate, Tetraethyl silicate

  • CAS Number 78-10-4

  • Linear Formula Si(OC2H5)4

  • Molecular Weight 208.33

  •  Beilstein/REAXYS Number 1422225

  •  EC Number 201-083-8

  •  MDL number MFCD00009062

  •  PubChem Substance ID 329766783

  •  NACRES NA.23

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Properties

Related Categories 14: Silicon, CVD and ALD Precursors Packaged for Deposition Systems, Materials Science, Micro/NanoElectronics, Vapor Deposition Precursors More...
Quality Level   100
vapor density   7.2 (vs air)
vapor pressure   <1 mmHg ( 20 °C)
assay   ≥99.5% (GC)
form   liquid
refractive index   n20/D 1.382 (lit.)
bp   168 °C (lit.)
density   0.933 g/mL at 20 °C (lit.)
SMILES string   CCO[Si](OCC)(OCC)OCC
InChI   1S/C8H20O4Si/c1-5-9-13(10-6-2,11-7-3)12-8-4/h5-8H2,1-4H3
InChI key   BOTDANWDWHJENH-UHFFFAOYSA-N

Description

Application

Tetraethyl orthosilicate (TEOS) is an oxygen containing precursor of Si used for the deposition of:
• Si oxide
• Oxycarbide
• Doped silicate
• Silanol
• Siloxane polymer
• Organosilicon thin films

The films can be deposited at low temperatues (<250 °C). TEOS is also used to deposit mesoporous and nanoporous thin films of silica. These porous films can be doped during deposition to further enhance their properties.

Commonly used as a precursor to prepare xerogel

Will interact with dodecylamine in the formation of intercalation compounds of H+-magadiite and used in a study of mixed-metal bioactive glasses.

Packaging

25 mL in stainless steel cylinder

Safety & Documentation

Safety Information

Symbol 
Signal word 
Warning
Hazard statements 
Target organs 
Respiratory system
RIDADR 
UN1292 - class 3 - PG 3 - Tetraethyl silicate
WGK Germany 
WGK 1
RTECS 
VV9450000
Flash Point(F) 
113.0 °F - closed cup
Flash Point(C) 
45 °C - closed cup

Frequently Asked Questions

Which document(s) contains shelf-life or expiration date information for a given product?
If available for a given product, the recommended re-test date or the expiration date can be found on the Certificate of Analysis.
How do I get lot-specific information or a Certificate of Analysis?
The lot specific COA document can be found by entering the lot number above under the "Documents" section.
How do I find price and availability?
There are several ways to find pricing and availability for our products. Once you log onto our website, you will find the price and availability displayed on the product detail page. You can contact any of our Customer Sales and Service offices to receive a quote. USA customers: 1-800-325-3010 or view local office numbers.
What is the Department of Transportation shipping information for this product?
Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product.
Can the empty deposition cylinders be refilled?
Yes, we are able to refill these cylinders through our SAFC Hitech group. Please contact our Technical Service department by emailat techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.
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Protocols & Articles
Peer-Reviewed Papers
15

References

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